JPS6114521A - ガス流量測定装置 - Google Patents
ガス流量測定装置Info
- Publication number
- JPS6114521A JPS6114521A JP13499484A JP13499484A JPS6114521A JP S6114521 A JPS6114521 A JP S6114521A JP 13499484 A JP13499484 A JP 13499484A JP 13499484 A JP13499484 A JP 13499484A JP S6114521 A JPS6114521 A JP S6114521A
- Authority
- JP
- Japan
- Prior art keywords
- disk
- gas
- chamber
- nozzle
- impact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title description 3
- 230000001154 acute effect Effects 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 3
- 230000003116 impacting effect Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 74
- 239000007788 liquid Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 235000008694 Humulus lupulus Nutrition 0.000 description 1
- 244000025221 Humulus lupulus Species 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 239000003562 lightweight material Substances 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13499484A JPS6114521A (ja) | 1984-06-27 | 1984-06-27 | ガス流量測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13499484A JPS6114521A (ja) | 1984-06-27 | 1984-06-27 | ガス流量測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6114521A true JPS6114521A (ja) | 1986-01-22 |
| JPH0458563B2 JPH0458563B2 (en]) | 1992-09-17 |
Family
ID=15141452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13499484A Granted JPS6114521A (ja) | 1984-06-27 | 1984-06-27 | ガス流量測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6114521A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6964890B1 (en) | 1992-03-17 | 2005-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for forming the same |
| AU2003242336A1 (en) * | 2003-06-12 | 2005-01-04 | Nihon University | Flowmeter |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5225667A (en) * | 1975-08-22 | 1977-02-25 | Sanfuremu Akiyumu Kk | Flow meter |
| JPS5321957A (en) * | 1976-08-12 | 1978-02-28 | Koujirou Kashiwara | Current meter for subterranean water |
| JPS5684714U (en]) * | 1979-11-30 | 1981-07-08 | ||
| JPS56151315A (en) * | 1980-04-25 | 1981-11-24 | Nippon Denso Co Ltd | Flow rate detector |
-
1984
- 1984-06-27 JP JP13499484A patent/JPS6114521A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5225667A (en) * | 1975-08-22 | 1977-02-25 | Sanfuremu Akiyumu Kk | Flow meter |
| JPS5321957A (en) * | 1976-08-12 | 1978-02-28 | Koujirou Kashiwara | Current meter for subterranean water |
| JPS5684714U (en]) * | 1979-11-30 | 1981-07-08 | ||
| JPS56151315A (en) * | 1980-04-25 | 1981-11-24 | Nippon Denso Co Ltd | Flow rate detector |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0458563B2 (en]) | 1992-09-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |